PUML(Piezoelectric Ultrasonic Motor of Linear Type) Series

Product Information

• Convert simple vibration of piezoelectric ceramics to rotary or linear motion
  
• Using the ceramic which is not magnetism material, authorization voltage ultrasonic waves (20kHz above) alternating voltage use

Features

• Quick response, Strong Output, Minimizing sound.
• None slip or backlash
• Without additional equipment
• Usable in a special environment (clean, vacuum, very low temperature space etc)
• No EMI
• Precision positioning possible (nm level) ability equipment to be small and light

Applications

• Micro-, Nano maching : manufacturing and assembling of micro~nano scale parts
• Semiconductor Handling system : stepper, xy stage etc.
• FA system, transfer for physical distribution, Precision lathe machinery, Robotics
• Defense system : radar and driving system of weapon, Optic facilities
• And other driving system for industrial equipment.

Specifications

ITEM	PUML20	PUML20-2S
Operating frequency (kHz)	94 ~ 99	94-99
Input voltage (VDC)	24	24
Driving voltage (Vrms)	100	100
Current (A)	0.3 ~ 0.5	0.6~1.0
Holding force (N)	7 ~ 8	14~16
Moving force (N)	5	10
Max speed (mm/s)	150	150
Resolution (nm)	50	50
Operating temperature (°C)	0 ~ 5	0~50
Size (L x W x H)mm	22(28) x 22 x 11	22(28) x 22 x 22